Tisk…

Inline gas filters, Wafergard® II F Micro

Dodavatel: Entegris
Wafergard®
ENTEWG2FT1RR2EA 0 CZK
ENTEWG2FT1RR2 ENTEWG2FT1SS2 ENTEWG2FT1BW2 ENTEWG2FT1RF2
Inline gas filters, Wafergard® II F Micro
Filtry Filtry na plyny
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

  • Superior particulate filtration for ultrapure gas system filtration
  • Low pressure drop reduces the risk of condensation in low vapour pressure gases
  • Cleanroom manufactured, welded and tested
  • PTFE membranes provide high efficiency filtration

Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished VAR 316L stainless steel.

Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, inside process tools.

Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.

Downstream cleanliness volatiles: <10 ppb moisture.
Objednat

Learn more

About VWR

Avantor is a vertically integrated, global supplier of discovery-to-delivery solutions for...

Více About VWR