Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.
- Superior particulate filtration for ultrapure gas system filtration
- Low pressure drop reduces the risk of condensation in low vapour pressure gases
- Cleanroom manufactured, welded and tested
- PTFE membranes provide high efficiency filtration
Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished VAR 316L stainless steel.
Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, inside process tools.
Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.
Downstream cleanliness volatiles: <10 ppb moisture.